Facilities in QDL at HKU

3 gas inputs with individual flow controllers 80 mm tube Turbo-pumping station added Location: LG208, CYM Physics Building, HKU Contact: dkki@hku.hk

Etching gas connected: CF4, O2, and Ar Up to 100 Watts Location: 312A, CYM Physics Building, HKU Contact: dkki@hku.hk